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Inkjet Printing, Laser-Based Micromachining and Micro 3D Printing Technologies for MEMS
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0003-3452-6361
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-0525-8647
2015 (English)In: Handbook of Silicon Based MEMS Materials and Technologies: Second Edition, Elsevier Inc. , 2015, p. 550-564Chapter in book (Other academic)
Abstract [en]

A number of unconventional micro-fabrication technologies are emerging that are suitable for micromachining of MEMS devices. These micromachining approaches typically are sequential processes in which devices on a substrate are formed one at a time, as opposed to conventional parallel and high-throughput semiconductor manufacturing processes. Nevertheless, many of the serial micromachining processes, including inkjet printing technologies and laser-based processes can be highly efficient and cost competitive, especially for low and medium sized manufacturing volumes as well as for prototyping purposes. The technologies presented in this chapter can be categorized as additive micromachining approaches (e.g., inkjet printing) and subtractive micromachining approaches (e.g., laser ablation). This chapter discusses the more mature technologies that are already being developed in a commercial context and a number of new and emerging micromachining approaches that are still in the early research and development stage. 

Place, publisher, year, edition, pages
Elsevier Inc. , 2015. p. 550-564
Keywords [en]
E-beam assisted deposition, Etching, Focused ion beam milling, Inkjet printing, Laser ablation, Laser writing, Micro-laser sintering, Micromachining, Microstereolithography
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-216899DOI: 10.1016/B978-0-323-29965-7.00026-9Scopus ID: 2-s2.0-85018234475ISBN: 9780323312233 ISBN: 9780323299657 OAI: oai:DiVA.org:kth-216899DiVA, id: diva2:1153737
Note

Export Date: 24 October 2017; Book Chapter; Correspondence Address: Fischer, A.C.; Department of Micro and Nanosystems, KTH Royal Institute of TechnologySweden. QC 20171031

Available from: 2017-10-31 Created: 2017-10-31 Last updated: 2017-10-31Bibliographically approved

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Fischer, Andreas C.Niklaus, Frank

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CiteExportLink to record
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Citation style
  • apa
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