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10+ kV implantation-free 4H-SiC PiN diodes
KTH, School of Information and Communication Technology (ICT), Electronics, Integrated devices and circuits.
KTH, School of Information and Communication Technology (ICT), Electronics, Integrated devices and circuits.ORCID iD: 0000-0001-8108-2631
KTH, School of Information and Communication Technology (ICT), Electronics, Integrated devices and circuits.ORCID iD: 0000-0002-5845-3032
2017 (English)In: 11th European Conference on Silicon Carbide and Related Materials, ECSCRM 2016, Trans Tech Publications Ltd , 2017, p. 423-426Conference paper (Refereed)
Abstract [en]

Implantation-free mesa etched 10+ kV 4H-SiC PiN diodes are fabricated, measured and analyzed by device simulation. An area-optimized junction termination extension (O-JTE) is implemented in order to achieve a high breakdown voltage. The diodes design allows a high breakdown voltage of about 19.3 kV according to simulations by Sentaurus TCAD. No breakdown voltage is recorded up to 10 kV with a very low leakage current of 0.1 μA. The current spreading within the thick drift layer is considered and a voltage drop (VF) of 8.3 V and 11.4 V are measured at 50 A/cm2 and 100 A/cm2, respectively. The differential on-resistance (Diff. Ron) of 67.7 mΩ.cm2 and 55.7 mΩ.cm2 are measured at 50 A/cm2 and 100 A/cm2, respectively.

Place, publisher, year, edition, pages
Trans Tech Publications Ltd , 2017. p. 423-426
Keywords [en]
Conductivity modulation, Differential on-resistance, Forward voltage drop, Implantation-free, PiN diode, Ultra-high-voltage
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:kth:diva-216561DOI: 10.4028/www.scientific.net/MSF.897.423Scopus ID: 2-s2.0-85019990289ISBN: 9783035710434 OAI: oai:DiVA.org:kth-216561DiVA, id: diva2:1155658
Conference
25 September 2016 through 29 September 2016
Note

QC 20171108

Available from: 2017-11-08 Created: 2017-11-08 Last updated: 2017-11-08Bibliographically approved

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Authority records BETA

Salemi, ArashElahipanah, HosseinZetterling, Carl-MikaelÖstling, Mikael

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Salemi, ArashElahipanah, HosseinZetterling, Carl-MikaelÖstling, Mikael
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  • apa
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