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On electron heating in a low pressure capacitively coupled oxygen discharge
KTH, School of Electrical Engineering (EES), Space and Plasma Physics. University of Iceland, Iceland.ORCID iD: 0000-0002-8153-3209
University of Iceland.
2017 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 122, no 19, 193302Article in journal (Refereed) Published
Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2017. Vol. 122, no 19, 193302
Keyword [en]
Capacitively coupled discharges, particle-in-cell
National Category
Physical Sciences
Research subject
Physics
Identifiers
URN: urn:nbn:se:kth:diva-219555DOI: 10.1063/1.5003971Scopus ID: 2-s2.0-85035002391OAI: oai:DiVA.org:kth-219555DiVA: diva2:1163565
Funder
VINNOVA, 2014-04876
Note

QC 20180112

Available from: 2017-12-07 Created: 2017-12-07 Last updated: 2018-01-12Bibliographically approved

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Publisher's full textScopushttp://aip.scitation.org/doi/10.1063/1.5003971

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