Laboratory arrangement for soft x-ray zone-plate efficiency measurements
2007 (English)In: Review of Scientific Instruments, ISSN 0034-6748, E-ISSN 1089-7623, Vol. 78, no 2, 026103- p.Article in journal (Refereed) Published
We demonstrate a laboratory-scale arrangement for rapid and accurate measurements of the absolute and local efficiency of soft x-ray micro zone plates in the water window. This in-house instrument is based on a single-line lambda=2.88 nm liquid-jet laser-plasma source. Measurements are performed by a simultaneous comparison of first diffraction-order photon flux with the flux in a calibrated reference signal. This arrangement eliminates existing source emission fluctuations. The performance of the method is demonstrated by the result from measurements of two similar to 55 mu m diameter nickel micro zone plates, showing a groove efficiency of 12.9%+/- 1.1% and 11.7%+/- 1.0%. Furthermore, we show that spatially resolved efficiency mapping is an effective tool for a detailed characterization of local zone plate properties. Thus, this laboratory-scale instrument allows rapid feedback to the fabrication process which is important for future improvements.
Place, publisher, year, edition, pages
2007. Vol. 78, no 2, 026103- p.
Electron diffraction; Laser beams; Photons; Plasma theory; X rays; Emission fluctuations; Micro zone plates; Reference signals; Plates (structural components)
IdentifiersURN: urn:nbn:se:kth:diva-7018DOI: 10.1063/1.2472590ISI: 000244531600057ScopusID: 2-s2.0-33847677594OAI: oai:DiVA.org:kth-7018DiVA: diva2:11893
QC 201008202007-04-202007-04-202011-02-21Bibliographically approved