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Manufacturing and Characterization of a Carbon-Based Amorphous (a-CNX) Coating Material
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics. (Manufacturing and Metrology Systems)
KTH, School of Industrial Engineering and Management (ITM), Production Engineering. (Manufacturing and Metrology Systems)
2018 (English)In: Nanomanufacturing and Metrology, ISSN 2520-8128, Vol. 1, no 1, p. 1-14Article in journal (Refereed) Published
Abstract [en]

A thick 400-micron amorphous carbon nitride (a-CNX ) coating material was synthesized by means of plasma-enhanced chemical vapor deposition process. High-power impulse magnetron sputtering technique was used to sputter a pure graphite target plate in reactive argon (Ar), nitrogen (N2 ) and acetylene (C2 H2 ) environment for depositing the omposite coating. Structural and chemical/elemental composition of the a-CNX  composite material was investigated by field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy and micro-Raman spectroscopy. The rootmean-square surface roughness (Sq ) and structure were estimated by atomic force microscopy. Mechanical properties such as hardness and Young’s modulus (Oliver–Pharr method) at room temperature were characterized by Vickers microindentation test. Operational temperature test of the deposited a-CNX  coating reveals that it can withstand up to 400 C without cracking. An inverted shaker test, based on central impedance method, was adopted to investigate the dynamic damping property of the coating material, and it was found that the first bending mode damping lossfactor of the reported a-CNX  coating is 0.015 ±  0.001 and corresponding loss modulus (Young’s modulus multiplied by lossfactor) is 0.234 ±  0.011 GPa.

Place, publisher, year, edition, pages
Singapore: Springer, 2018. Vol. 1, no 1, p. 1-14
Keywords [en]
PECVD, Reactive HiPIMS, Amorphous carbon nitride (a-CNx), Mechanical properties, Material properties, System damping lossfactor, Material damping lossfactor
National Category
Production Engineering, Human Work Science and Ergonomics
Research subject
Production Engineering
Identifiers
URN: urn:nbn:se:kth:diva-231981DOI: 10.1007/s41871-018-0014-yOAI: oai:DiVA.org:kth-231981DiVA, id: diva2:1231382
Funder
XPRES - Initiative for excellence in production researchAvailable from: 2018-07-06 Created: 2018-07-06 Last updated: 2018-07-06

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