Wafer-Level Process for Single-Use Buckling Film Microliter-Range Pumps
2007 (English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 16, no 4, 795-801 p.Article in journal (Refereed) Published
In this paper, we present the development of disposable single-use microfluidic pumps entirely based on a straightforward wafer-level fabrication scheme, which allows for precise integrated active dosing in the microliter range. To accomplish stroke-lengths needed for microliter-range applications, we utilize a new method of bending of a unimorph-composite-actuator film. The unimorph composite actuator consists of a temperature-sensitive silicone elastomer composite, i.e., polydimethylsiloxane, with incorporated expandable microspheres. The fabricated micropumps successfully demonstrated precise liquid-volume control, both at low and high flow rates, and show a standard deviation of 6.7% for consecutive pump experiments. Moreover, the method of fluorescent thermometry was used to measure the thermal load on liquid volumes dispensed with the micropumps. The liquid temperature reaches a maximum of 50 degrees C during the operation. The presented fully integrated single-use micropumps are electrically controllable, do not require external means for liquid actuation, are made of low-cost materials only, and might potentially be used in drug-delivery applications.
Place, publisher, year, edition, pages
2007. Vol. 16, no 4, 795-801 p.
Fabrication; Fluidics; Micropumps; Wafer-scale integration; Actuators; Bending (deformation); Buckling; Composite films; Microspheres; Pumps; Temperature; WSI circuits; Composite actuators; Microliter-range pumps; Wafer-level fabrication scheme; Microfluidics
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-7399DOI: 10.1109/JMEMS.2007.901642ISI: 000248578700003ScopusID: 2-s2.0-34547684912OAI: oai:DiVA.org:kth-7399DiVA: diva2:12415
QC 201008172007-08-212007-08-212010-08-17Bibliographically approved