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ON ELECTRON HEATING IN MAGNETRON SPUTTERING DISCHARGES
KTH, School of Electrical Engineering and Computer Science (EECS), Space and Plasma Physics.ORCID iD: 0000-0002-8153-3209
Univ Paris Saclay, Univ Paris Sud, LPGP, CNRS,UMR 8578, F-91405 Orsay, France..
KTH, School of Electrical Engineering and Computer Science (EECS), Space and Plasma Physics.
KTH, School of Electrical Engineering and Computer Science (EECS), Space and Plasma Physics.
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2017 (English)In: 2017 IEEE International Conference on Plasma Science (ICOPS), IEEE , 2017Chapter in book (Other academic)
Abstract [en]

Summary form only given. The magnetron sputtering discharge is a highly successful tool for deposition of thin films and coatings. It has been applied for various industrial applications for over four decades. Sustaining a plasma in a magnetron sputtering discharge requires energy transfer to the plasma electrons. In the past, the magnetron sputtering discharge has been assumed to be maintained by cathode sheath acceleration of secondary electrons emitted from the target, upon ion impact. These highly energetic electrons then either ionize the atoms of the working gas directly or transfer energy to the local lower energy electron population that subsequently ionizes the working gas atoms. This leads to the well-known Thornton equation, which in its original form is formulated to give the minimum required voltage to sustain the discharge. However, recently we have demonstrated that Ohmic heating of electrons outside the cathode sheath is typically of the same order as heating due to acceleration across the sheath in dc magnetron sputtering (dcMS) discharges. The secondary electron emission yield ╬│see is identified as the key parameter determining the relative importance of the two processes. In the case of dcMS Ohmic heating is found to be more important than sheath acceleration for secondary electron emission yields below around 0.1. For the high power impulse magnetron sputtering (HiPIMS) discharge we find that direct Ohmic heating of the plasma electrons is found to dominate over sheath acceleration by typically an order of magnitude, or in the range of 87 - 99 % of the total electron heating. A potential drop of roughly 100 - 150 V, or 15 - 25% of the discharge voltage, always falls across the plasma outside the cathode sheath.

Place, publisher, year, edition, pages
IEEE , 2017.
Series
2017 IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCE (ICOPS)
National Category
Fusion, Plasma and Space Physics
Identifiers
URN: urn:nbn:se:kth:diva-239863DOI: 10.1109/PLASMA.2017.8496227ISI: 000450253400248OAI: oai:DiVA.org:kth-239863DiVA, id: diva2:1270905
Note

QC 20181214

Available from: 2018-12-14 Created: 2018-12-14 Last updated: 2018-12-14Bibliographically approved

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Gudmundsson, Jon TomasRaadu, Michael A.Huo, ChunqingBrenning, Nils

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