GaAs-based multiple-quantum-well spatial light modulators fabricated by a wafer-scale process
2005 (English)In: Applied Optics, ISSN 0003-6935, E-ISSN 1539-4522, Vol. 44, no 9, 1635-1641 p.Article in journal (Refereed) Published
The design, fabrication, and characterization of large, two-dimensional multiple-quantum-well modulator arrays are presented. Such arrays present a speed advantage compared with competing technologies such as liquid crystals and micromirrors, which are intrinsically limited to the kilohertz range. We discuss the design compromises to reach high-contrast, low-voltage swing optical structures compatible with complementary metal-oxide semiconductor-based integrated circuits and present experimental results. Contrast ratio of 5:1 (limited by the fill factor), variations in uniformity below 1 nm, and frame rates in excess of 10 kHz are demonstrated. Technology maturity for volume production is also discussed.
Place, publisher, year, edition, pages
2005. Vol. 44, no 9, 1635-1641 p.
Distributed bragg reflectors (DBR); Micromirrors; Two-dimensional multiple-quantum-well modulation arrays; Wafer-scale processing
IdentifiersURN: urn:nbn:se:kth:diva-7627DOI: 10.1364/AO.44.001635ISI: 000227758000016OAI: oai:DiVA.org:kth-7627DiVA: diva2:12712
QC 201008022007-11-122007-11-122010-12-06Bibliographically approved