Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
The Influence of Secondary Electron Emission and Electron Reflection on a Capacitively Coupled Oxygen Discharge
Univ Iceland, Inst Sci, Dunhaga 3, IS-107 Reykjavik, Iceland..
KTH, School of Electrical Engineering and Computer Science (EECS), Space and Plasma Physics.ORCID iD: 0000-0002-8153-3209
2018 (English)In: ATOMS, ISSN 2218-2004, Vol. 6, no 4, article id 65Article in journal (Refereed) Published
Abstract [en]

The one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 is applied to explore the role of secondary electron emission and electron reflection on the properties of the capacitively-coupled oxygen discharge. At low pressure (10 mTorr), drift-ambipolar heating of the electrons dominates within the plasma bulk, while at higher pressure (50 mTorr), stochastic electron heating in the sheath region dominates. Electron reflection has negligible influence on the electron energy probability function and only a slight influence on the electron heating profile and electron density. Including ion-induced secondary electron emission in the discharge model introduces a high energy tail to the electron energy probability function, enhances the electron density, lowers the electronegativity, and increases the effective electron temperature in the plasma bulk.

Place, publisher, year, edition, pages
MDPI , 2018. Vol. 6, no 4, article id 65
Keywords [en]
capacitively-coupled discharge, oxygen, particle-in-cell/Monte Carlo collision, electron heating, secondary electron emission
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:kth:diva-241333DOI: 10.3390/atoms6040065ISI: 000454748100012Scopus ID: 2-s2.0-85058894209OAI: oai:DiVA.org:kth-241333DiVA, id: diva2:1281901
Note

QC 20190123

Available from: 2019-01-23 Created: 2019-01-23 Last updated: 2019-01-23Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full textScopus

Authority records BETA

Gudmundsson, Jon Tomas

Search in DiVA

By author/editor
Gudmundsson, Jon Tomas
By organisation
Space and Plasma Physics
Condensed Matter Physics

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 3 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf