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Localized Fe-56(+) Ion Implantation of TiO2 Using Anodic Porous Alumina
Linkoping Univ, IFM, Thin Film Phys Div, SE-58183 Linkoping, Sweden..
CSIC, Inst Ciencia Mat Madrid, Madrid 28043, Spain..
CSIC, Inst Ciencia Mat Madrid, Madrid 28043, Spain..
CSIC, Inst Ciencia Mat Madrid, Madrid 28043, Spain.;Univ Autonoma Madrid, Appl Phys Dept, Madrid 28043, Spain..
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2010 (English)In: ION BEAMS AND NANO-ENGINEERING / [ed] Ila, D Chu, PK Lindner, JKN Kishimoto, N Baglin, JEE, MATERIALS RESEARCH SOC , 2010, p. 3-+Conference paper, Published paper (Refereed)
Abstract [en]

We present result following localized ion implantation of rutile titanium dioxide (TiO2) using anodic porous alumina as a mask. The implantation were performed with 100 keV Fe-56(+) ions using a fluence of 1.3.10(16) ions/cm(2). The surface modifications where studied by means of SEM, AFM/MFM and XRD. A well-defined hexagonal pattern of modified material in the near surface structure is observed. Local examination of the implanted areas revealed no clear magnetic signal. However, a variation in mechanical and electrostatic behavior between implanted and non-implanted zones is inferred from the variation in AFM signals.

Place, publisher, year, edition, pages
MATERIALS RESEARCH SOC , 2010. p. 3-+
Series
Materials Research Society Symposium Proceedings, ISSN 0272-9172 ; 1181
National Category
Biomaterials Science
Identifiers
URN: urn:nbn:se:kth:diva-242812ISI: 000290242400001ISBN: 978-1-60511-154-4 (print)OAI: oai:DiVA.org:kth-242812DiVA, id: diva2:1290313
Conference
Symposium on Ion Beams and Nano-Engineering, APR 14-17, 2009, San Francisco, CA
Note

QC 20190220

Available from: 2019-02-20 Created: 2019-02-20 Last updated: 2019-02-20Bibliographically approved

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Hallén, Anders

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