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Micromachined THz Systems - enabling the large-scale exploitation of the THz frequency spectrum
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0003-3339-9137
2018 (English)In: 2018 ASIA-PACIFIC MICROWAVE CONFERENCE PROCEEDINGS (APMC), IEEE , 2018, p. 25-27Conference paper, Published paper (Refereed)
Abstract [en]

Micro-electromechanical (MEMS) devices are ubiquitous in modern society: mobile phones, toys, cars contain MEMS sensors which are manufactured in several billions of devices per year at sub-1 Euro cost. This large-scale utilization of low-cost, highly-miniaturized sensor functions has been enabled by micromachining proving large-scale parallel processing, very high level of integration, excellent product uniformity and very high volume manufacturing capability. State-of-the-art THz technology, however, is still utilizing CNC-milling as the most common packaging and integration technology, which is a sequential fabrication technology which is not scalable to medium to high volumes. This paper summarizes the state of the art in silicon micromachining, discusses advantages and disadvantages and describes several millimeter-wave and submillimeter-wave devices implemented in micromachined waveguide technology, including very-low loss filters, OMTs, couplers, integrated absorbers/attenuators, switches.

Place, publisher, year, edition, pages
IEEE , 2018. p. 25-27
Keywords [en]
THz MEMS, micromachining, micromachined waveguides, micro-electromechanical systems, MEMS, filters
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-244582ISI: 000457599800009Scopus ID: 2-s2.0-85061824752OAI: oai:DiVA.org:kth-244582DiVA, id: diva2:1294156
Conference
30th Asia-Pacific Microwave Conference, APMC 2018; Kyoto; Japan; 6 November 2018 through 9 November 2018
Note

QC 20190306

Available from: 2019-03-06 Created: 2019-03-06 Last updated: 2019-03-06Bibliographically approved

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Oberhammer, Joachim

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