High-quality-factor micro-ring resonator in amorphous-silicon on insulator structure
2008 (English)In: ECIO'08 Eindhoven - Proceedings of the 14th European Conference on Integrated Optics and Technical Exhibition, Contributed and Invited Papers, 2008, 329-332 p.Conference paper (Refereed)
Micro-ring resonators have been fabricated in hydrogenated amorphous silicon on silica structure. The intrinsic quality factor is estimated as 56,000 and the notch depth is ̃ 30dB. The intrinsic loss per unit length is 15.3dB/cm, comparable to 9.16dB/cm in the single-crystalline silicon ring of the same geometry.
Place, publisher, year, edition, pages
2008. 329-332 p.
Exhibitions, Integrated circuits, Integrated optics, Optical materials, Optical resonators, Photonics, Resonators, Silica, Crystalline silicons, Hydrogenated amorphous silicons, Intrinsic losses, Intrinsic quality factors, Notch depths, Per unit lengths, Ring resonators, Silica structures, Silicon on insulator structures
Atom and Molecular Physics and Optics
IdentifiersURN: urn:nbn:se:kth:diva-8027ScopusID: 2-s2.0-58149105797OAI: oai:DiVA.org:kth-8027DiVA: diva2:13236
QC 201009232008-02-222008-02-222010-09-23Bibliographically approved