SU8 plating mold for high aspect-ratio nickel zone plates
2007 (English)In: Microelectronic Engineering, ISSN 0167-9317, Vol. 84, 1136- p.Article in journal (Refereed) Published
Nickel zone plates are fabricated by electrodeposition into a mold with high aspect ratio and narrow line width. This process requires high-mechanical stability of the mold to avoid pattern collapse in the plating bath. In the present paper we demonstrate how SU-8 can be used as plating mold material in a tri-layer resist to fabricate 35-nm half-pitch nickel gratings with an aspect ratio exceeding 11:1. To attain sufficient stability of the mold the SU-8 was cured by e-beam exposure with a dose of 25 mC/cm2 at 5-keV electron energy.
Place, publisher, year, edition, pages
2007. Vol. 84, 1136- p.
SU-8; zone plate; aspect ratio; electroplating
IdentifiersURN: urn:nbn:se:kth:diva-9805DOI: 10.1016/j.mee.2007.01.109ISI: 000247182500105ScopusID: 2-s2.0-34247645044OAI: oai:DiVA.org:kth-9805DiVA: diva2:133124
QC 201007282009-01-072009-01-072010-12-06Bibliographically approved