Nickel-germanium soft x-ray zone plates
2009 (English)In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 27, no 3, L5-L7 p.Article in journal (Refereed) Published
This article presents a fabrication process for soft x-ray zone plates in which nickel and germanium are combined to achieve high diffraction efficiency. A nickel zone plate is first fabricated on a germanium film and then used as a hardmask for a CHF3-plasma etch into the germanium. Zone plates with 50-60 nm nickel and 110-150 nm of germanium are presented. The measured diffraction efficiencies were 10%-11% at lambda=2.88 nm, which shows that high efficiency is possible even with thin nickel. Thus, the method has a potential for improving the efficiency of high-resolution zone plates for which the high-aspect-ratio structuring of nickel is difficult.
Place, publisher, year, edition, pages
2009. Vol. 27, no 3, L5-L7 p.
elemental semiconductors; germanium; light diffraction; nanofabrication; nickel; semiconductor thin films; X-ray microscopy; X-ray optics; zone plates
IdentifiersURN: urn:nbn:se:kth:diva-9807DOI: 10.1116/1.3117256ISI: 000266500300001ScopusID: 2-s2.0-70449726046OAI: oai:DiVA.org:kth-9807DiVA: diva2:133130
Tidigare titel: High-efficency nickel-germanium soft x-ray zone plates
QC 201007282009-01-072009-01-072011-11-14Bibliographically approved