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Effects of Substrate and Post-Deposition Annealing on Structural and Optical Properties of (ZnO)(1-x)(GaN)x Films
Univ Oslo, Ctr Mat Sci & Nanotechnol, Dept Phys, POB 1048, N-0316 Oslo, Norway..
Univ Oslo, Ctr Mat Sci & Nanotechnol, Dept Phys, POB 1048, N-0316 Oslo, Norway..
KTH, School of Industrial Engineering and Management (ITM), Materials Science and Engineering.
Univ Oslo, Ctr Mat Sci & Nanotechnol, Dept Phys, POB 1048, N-0316 Oslo, Norway..
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2019 (English)In: Physica status solidi. B, Basic research, ISSN 0370-1972, E-ISSN 1521-3951, Vol. 256, no 6, article id 1800529Article in journal (Refereed) Published
Abstract [en]

The structural and optical properties of magnetron sputtered thin films of (ZnO)(1-x)(GaN)(x) deposited on zinc oxide, sapphire, and silicon oxide are studied as a function of strain accumulation and postdeposition anneals at 600-800 degrees C. For the experimental conditions studied, we found that different amounts of tensile strain accumulated in the samples practically does not affect the strong bandbowing effect, that is, optical bandgap, observed in the asdeposited alloys. In its turn, postdeposition annealing results in a reduction of the tensile strain and dislocation density in the films, as measured by both X-ray diffraction and transmission electron microscopy, corroborating an increase in the crystal quality. In addition, the grain size is found to increase with annealing temperature, for example, mean values of 20 nm up to 50 nm were measured for the alloys with x=0.15. Meanwhile, the fullwidth at half maximum of the (0002) X-ray diffraction reflection increases with annealing temperature, but with only a small increase in bandgap energies for the x=0.15 sample. However, this observation was explained combining the experimental data and firstprinciples calculations based on density functional theory, showing that the increase in the amount of Ga-N bonds lowers the total energy of the system. As such, we conclude that the thermal treatments increase the Ga-N ordering, resulting in several contributions or a widening of the diffraction peaks.

Place, publisher, year, edition, pages
WILEY-V C H VERLAG GMBH , 2019. Vol. 256, no 6, article id 1800529
Keywords [en]
alloying, annealing, density functional theory (DFT), magnetron sputtering, substrate dependency, thin films, NTON AR, 1991, PHYSICAL REVIEW A, V43, P3161 et Sudhakar, 2013, JOURNAL OF POWER SOURCES, V232, P74 u J., 2016, Phys. Rev. B, V93, P1 ngh D., 2017, MATERIALS RESEARCH EXPRESS, V4
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:kth:diva-255453DOI: 10.1002/pssb.201800529ISI: 000473612400030Scopus ID: 2-s2.0-85065034616OAI: oai:DiVA.org:kth-255453DiVA, id: diva2:1344905
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QC 20190822

Available from: 2019-08-22 Created: 2019-08-22 Last updated: 2019-08-22Bibliographically approved

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Baldissera, GustavoPersson, Clas

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