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Reducing actuation nonlinearity of MEMS phase shifters for reconfigurable photonic circuits
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems. (Photonic microsystems)
KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum and Biophotonics. (Quantum Nano Photonics)ORCID iD: 0000-0001-7249-7392
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems. (Photonic microsystems)ORCID iD: 0000-0001-9008-8402
2019 (English)Conference paper, Oral presentation with published abstract (Other academic)
Abstract [en]

The low power consumption of MEMS actuators enables large-scale reconfigurable photonic circuits. However, insertion loss and actuation linearity need improvement. By simulations and experiments, we analyze the dominating design parameters affecting linearity and suggest improvements

Place, publisher, year, edition, pages
Optical Society of America, 2019.
Keywords [en]
silicon photonics, MEMS, reconfigurable photonics
National Category
Nano Technology Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-258906OAI: oai:DiVA.org:kth-258906DiVA, id: diva2:1350270
Conference
CLEO 2019
Projects
MORPHICAvailable from: 2019-09-11 Created: 2019-09-11 Last updated: 2019-09-11

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Authority records BETA

Errando-Herranz, CarlosGylfason, Kristinn

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