Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-8811-1615
Scania Technical Centre.
KTH, School of Electrical Engineering and Computer Science (EECS), Electronics, Integrated devices and circuits.ORCID iD: 0000-0003-4637-8001
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems. Senseair AB.ORCID iD: 0000-0002-8853-0967
Show others and affiliations
2019 (English)In: Nature Electronics, ISSN 2520-1131, Vol. 2, no 9, p. 394-404Article in journal (Refereed) Published
Abstract [eo]

Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next-generation mobile, wearable and implantable devices. However, these NEMS devices require transducers that are ultra-small, sensitive and can be fabricated at low cost. Here, we show that suspended double-layer graphene ribbons with attached silicon proof masses can be used as combined spring–mass and piezoresistive transducers. The transducers, which are created using processes that are compatible with large-scale semiconductor manufacturing technologies, can yield NEMS accelerometers that occupy at least two orders of magnitude smaller die area than conventional state-of-the-art silicon accelerometers. With our devices, we also extract the Young’s modulus values of double-layer graphene and show that the graphene ribbons have significant built-in stresses.

Place, publisher, year, edition, pages
Nature Publishing Group, 2019. Vol. 2, no 9, p. 394-404
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-259517DOI: 10.1038/s41928-019-0287-1ISI: 000486394600009Scopus ID: 2-s2.0-85072131685OAI: oai:DiVA.org:kth-259517DiVA, id: diva2:1351802
Note

QC 20191004

Available from: 2019-09-16 Created: 2019-09-16 Last updated: 2019-10-14Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full textScopus

Authority records BETA

Fan, XugeSmith, Anderson DavidSchröder, StephanFischer, Andreas C.Östling, MikaelLemme, Max C.Niklaus, Frank

Search in DiVA

By author/editor
Fan, XugeSmith, Anderson DavidSchröder, StephanFischer, Andreas C.Östling, MikaelLemme, Max C.Niklaus, Frank
By organisation
Micro and NanosystemsIntegrated devices and circuits
Nano Technology

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 158 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf