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MEMS-Enabled Silicon Photonic Integrated Devices and Circuits
Ecole Polytech Fed Lausanne, CH-1015 Lausanne, Switzerland..
Ecole Polytech Fed Lausanne, CH-1015 Lausanne, Switzerland..
Ecole Polytech Fed Lausanne, CH-1015 Lausanne, Switzerland..
Ecole Polytech Fed Lausanne, CH-1015 Lausanne, Switzerland.;Beihang Univ, Beijing 100083, Peoples R China..
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2020 (English)In: IEEE Journal of Quantum Electronics, ISSN 0018-9197, E-ISSN 1558-1713, Vol. 56, no 1, article id 8400210Article in journal (Refereed) Published
Abstract [en]

Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process.

Place, publisher, year, edition, pages
IEEE, 2020. Vol. 56, no 1, article id 8400210
Keywords [en]
Integrated optics, microelectromechanical systems, nanophotonics, photonic integrated circuits, silicon photonics
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-266180DOI: 10.1109/JQE.2019.2946841ISI: 000501604100001Scopus ID: 2-s2.0-85077388014OAI: oai:DiVA.org:kth-266180DiVA, id: diva2:1385354
Note

QC 20200114

Available from: 2020-01-14 Created: 2020-01-14 Last updated: 2020-01-14Bibliographically approved

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Edinger, PierreErrando-Herranz, CarlosGylfason, Kristinn

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