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Manufacturing of Sub-20 NM Wide Single Nanowire Devices using Conventional Stepper Lithography
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-8821-6759
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0001-6731-3886
KTH, Superseded Departments (pre-2005), Signals, Sensors and Systems. KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-0525-8647
KTH, Superseded Departments (pre-2005), Signals, Sensors and Systems. KTH, Superseded Departments (pre-2005), Biotechnology. KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
2019 (English)In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), IEEE conference proceedings, 2019, p. 244-247Conference paper, Published paper (Refereed)
Abstract [en]

Single nanowires have a broad range of applications in chemical and bio-sensing, photonics, and material science, but realizing individual nanowire devices in a scalable manner remains extremely challenging. This work presents a scalable and flexible method to realize single gold nanowire devices. We use conventional optical stepper lithography to generate notched beam structures, and crack lithography to obtain sub-20-nm-wide nanogaps at the notches, thereby obtaining a suitable shadow mask to define a single nanowire device. Then a gold evaporation step through the shadow mask forms the individual gold nanowires with positional and dimensional accuracy and with electrical contacts to probing pads.

Place, publisher, year, edition, pages
IEEE conference proceedings, 2019. p. 244-247
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-268309DOI: 10.1109/MEMSYS.2019.8870647Scopus ID: 2-s2.0-85074363946OAI: oai:DiVA.org:kth-268309DiVA, id: diva2:1413659
Conference
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 27-31 Jan. 2019
Note

QC 20200310

Available from: 2020-03-10 Created: 2020-03-10 Last updated: 2020-03-10Bibliographically approved

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Publisher's full textScopushttps://ieeexplore.ieee.org/document/8870647

Authority records BETA

Enrico, AlessandroDubois, Valentin J.Niklaus, FrankStemme, Göran

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