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Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-8811-1615
KTH, School of Electrical Engineering and Computer Science (EECS), Electrical Engineering, Electronics and Embedded systems, Integrated devices and circuits.ORCID iD: 0000-0003-4637-8001
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-9820-8728
Rhein Westfal TH Aachen, Fac Elect Engn & Informat Technol, Otto Blumenthal Str 25, D-52074 Aachen, Germany..
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2020 (English)In: MICROSYSTEMS & NANOENGINEERING, ISSN 2055-7434, Vol. 6, no 1, article id 17Article in journal (Refereed) Published
Abstract [en]

Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene. We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields. We have demonstrated the manufacture of square graphene membranes with side lengths from 7 mu m to 110 mu m, and suspended proof masses consisting of solid silicon cubes that are from 5 mu mx5 mu mx16.4 mu m to 100 mu mx100 mu mx16.4 mu m in size. Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies, and the manufacturing yields of the graphene membranes with suspended proof masses were >90%, with >70% of the graphene membranes having >90% graphene area without visible defects. The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz, with quality factors ranging from 63 to 148. The graphene membranes with suspended proof masses were extremely robust, and were able to withstand indentation forces from an atomic force microscope (AFM) tip of up to 7000nN. The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances.

Place, publisher, year, edition, pages
NATURE PUBLISHING GROUP , 2020. Vol. 6, no 1, article id 17
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Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:kth:diva-273501DOI: 10.1038/s41378-019-0128-4ISI: 000528968400001Scopus ID: 2-s2.0-85083758503OAI: oai:DiVA.org:kth-273501DiVA, id: diva2:1431379
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QC 20200520

Available from: 2020-05-20 Created: 2020-05-20 Last updated: 2020-05-20Bibliographically approved

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Fan, XugeSmith, Anderson DavidForsberg, FredrikSchröder, StephanFischer, Andreas C.Östling, MikaelNiklaus, Frank

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Fan, XugeSmith, Anderson DavidForsberg, FredrikSchröder, StephanFischer, Andreas C.Östling, MikaelNiklaus, Frank
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Electrical Engineering, Electronic Engineering, Information Engineering

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