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Three-dimensional microstructures based on polyimide joints
KTH, Superseded Departments, Signals, Sensors and Systems.
1998 (English)Licentiate thesis, comprehensive summary (Other scientific)
Place, publisher, year, edition, pages
Stockholm: Signaler, sensorer och system , 1998. , v, 34 p.
Trita-ILA, ISSN 0281-2878 ; 98:02
URN: urn:nbn:se:kth:diva-795OAI: diva2:14775
NR 20140804Available from: 2000-09-26 Created: 2000-09-26Bibliographically approved

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