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Low pressure encapsulation techniques for silicon resonators
KTH, Superseded Departments, Signals, Sensors and Systems.
1998 (English)Licentiate thesis, comprehensive summary (Other scientific)
Place, publisher, year, edition, pages
Stockholm: Signaler, sensorer och system , 1998. , 45 p.
Series
Trita-ILA, ISSN 0281-2878 ; 98:01
Identifiers
URN: urn:nbn:se:kth:diva-796OAI: oai:DiVA.org:kth-796DiVA: diva2:14776
Note
NR 20140804Available from: 2000-09-26 Created: 2000-09-26Bibliographically approved

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CiteExportLink to record
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  • apa
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