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NEMS Sensors Based on Suspended Graphene
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-8811-1615
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-0525-8647
2021 (English)In: 2021 IEEE 16Th International Conference On Nano/Micro Engineered And Molecular Systems (Nems), Institute of Electrical and Electronics Engineers (IEEE) , 2021, p. 1169-1172Conference paper, Published paper (Refereed)
Abstract [en]

Graphene has exciting potential in nanoelectromechanical system (NEMS) applications due to its unique mechanical and electrical properties as well as its ultimate thinness. In this paper, we discuss the potential of using suspended graphene structures in NEMS sensors and provide an overview of our previous research results on piezoresistive graphene NEMS sensors, including pressure sensors and accelerometers.
Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE) , 2021. p. 1169-1172
Series
International Conference on Nano-Micro Engineered and Molecular Systems NEMS, ISSN 2474-3747
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:kth:diva-303382DOI: 10.1109/NEMS51815.2021.9451351ISI: 000693407600141Scopus ID: 2-s2.0-85113337673OAI: oai:DiVA.org:kth-303382DiVA, id: diva2:1603378
Conference
16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), APR 25-29, 2021, Xiamen, PEOPLES R CHINA
Note

Part of proceedings: ISBN 978-0-7381-2429-2, QC 20230117

Available from: 2021-10-15 Created: 2021-10-15 Last updated: 2023-01-17Bibliographically approved

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Fan, XugeNiklaus, Frank

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