Benchmarked and upgraded particle-in-cell simulations of a capacitive argon discharge at intermediate pressure: the role of metastable atomsShow others and affiliations
2021 (English)In: Plasma sources science & technology, ISSN 0963-0252, E-ISSN 1361-6595, Vol. 30, no 10, article id 105009Article in journal (Refereed) Published
Abstract [en]
The capacitive argon discharge operated in the intermediate pressure regime is studied by performing one-dimensional particle-in-cell Monte Carlo collision simulations. First, the basic object-oriented plasma device code (oopd1-v1) is strictly benchmarked against the well-established xpdp1 code over a wide range of pressure (0.05-15 Torr) and varying blocking capacitor of the external circuit (5-10(5) nF), and excellent agreement is obtained. The oopd1-v1 is upgraded to oopd1-v2 and oopd1-v3, by adding excited atoms modeled as time- and space-evolving fluid species. The metastable Ar-m, the radiative Ar(R), and the Ar(4p) manifold, and their roles in discharge equilibrium are explored. It is found that the presence of the metastable Ar-m enhances the plasma density by a factor of 3 at 1.6 Torr and even higher at pressures up to 5 Torr. At low pressure (0.05 Torr), electron impact ionization from the ground state atom dominates the ionization over the whole discharge region, while metastable pooling and step-wise ionization has small contribution. The proportion of metastable pooling ionization and step-wise ionization increases with increasing pressure and becomes the dominant ionization source at 5-15 Torr.
Place, publisher, year, edition, pages
IOP Publishing , 2021. Vol. 30, no 10, article id 105009
Keywords [en]
time- and space-evolving fluid species, capacitively coupled plasmas, electron power absorption dynamic, metastable atoms, metastable pooling and step-wise ionization, object-oriented particle-in-cell simulation, intermediate pressure regime
National Category
Fusion, Plasma and Space Physics Condensed Matter Physics
Identifiers
URN: urn:nbn:se:kth:diva-304293DOI: 10.1088/1361-6595/ac1b22ISI: 000706470100001Scopus ID: 2-s2.0-85118599880OAI: oai:DiVA.org:kth-304293DiVA, id: diva2:1607382
Note
QC 20211101
2021-11-012021-11-012022-09-15Bibliographically approved