Continuously Tunable Silicon Photonic Mems 2 X 2 Power CouplerShow others and affiliations
2021 (English)In: 2021 21St International Conference On Solid-State Sensors, Actuators and Microsystems (Transducers), Institute of Electrical and Electronics Engineers (IEEE) , 2021, p. 447-450Conference paper, Published paper (Refereed)
Abstract [en]
The integration of MEMS transducers in photonic integrated circuits provides opportunities for high efficiency photonic modulation and dynamic routing on-chip. We here present an electrostatically actuated, silicon photonic MEMS 2 x 2 power coupler, fabricated in IMEC's iSiPP50G platform followed by a dedicated MEMS release sequence. The in-plane, mechanical tuning mechanism provides analog power coupling between waveguides in a small form factor. With our experimental demonstration of broad, > 30 nm optical bandwidth, high extinction ratio of > 27 dB, and a low actuation voltage of only 6 V, the coupler fulfills the requirements for large-scale integration in next generation reconfigurable PICs.
Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE) , 2021. p. 447-450
Series
International Solid-State Sensors Actuators and Microsystems Conference, ISSN 2167-0013
Keywords [en]
Microelectromechanical systems, photonic integrated circuits, silicon photonics, photonics, optical switch
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-304861DOI: 10.1109/TRANSDUCERS50396.2021.9495551ISI: 000707041600121Scopus ID: 2-s2.0-85114962414OAI: oai:DiVA.org:kth-304861DiVA, id: diva2:1611552
Conference
21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), JUN 20-25, 2021, ELECTR NETWORK
Note
Part of proceedings: 978-1-6654-1267-4, QC 20230117
2021-11-152021-11-152023-01-17Bibliographically approved