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Continuously Tunable Silicon Photonic Mems 2 X 2 Power Coupler
Ecole Polytech Fed Lausanne EPFL, Lausanne, Switzerland..
Ecole Polytech Fed Lausanne EPFL, Lausanne, Switzerland..
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-7339-6662
Interuniv Microelect Ctr IMEC, Leuven, Belgium..
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2021 (English)In: 2021 21St International Conference On Solid-State Sensors, Actuators and Microsystems (Transducers), Institute of Electrical and Electronics Engineers (IEEE) , 2021, p. 447-450Conference paper, Published paper (Refereed)
Abstract [en]

The integration of MEMS transducers in photonic integrated circuits provides opportunities for high efficiency photonic modulation and dynamic routing on-chip. We here present an electrostatically actuated, silicon photonic MEMS 2 x 2 power coupler, fabricated in IMEC's iSiPP50G platform followed by a dedicated MEMS release sequence. The in-plane, mechanical tuning mechanism provides analog power coupling between waveguides in a small form factor. With our experimental demonstration of broad, > 30 nm optical bandwidth, high extinction ratio of > 27 dB, and a low actuation voltage of only 6 V, the coupler fulfills the requirements for large-scale integration in next generation reconfigurable PICs.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE) , 2021. p. 447-450
Series
International Solid-State Sensors Actuators and Microsystems Conference, ISSN 2167-0013
Keywords [en]
Microelectromechanical systems, photonic integrated circuits, silicon photonics, photonics, optical switch
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-304861DOI: 10.1109/TRANSDUCERS50396.2021.9495551ISI: 000707041600121Scopus ID: 2-s2.0-85114962414OAI: oai:DiVA.org:kth-304861DiVA, id: diva2:1611552
Conference
21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), JUN 20-25, 2021, ELECTR NETWORK
Note

Part of proceedings: 978-1-6654-1267-4, QC 20230117

Available from: 2021-11-15 Created: 2021-11-15 Last updated: 2023-01-17Bibliographically approved

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Edinger, PierreGylfason, Kristinn

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CiteExportLink to record
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Citation style
  • apa
  • ieee
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  • de-DE
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Output format
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