kth.sePublications
System disruptions
We are currently experiencing disruptions on the search portals due to high traffic. We are working to resolve the issue, you may temporarily encounter an error message.
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Modeling of high power impulse magnetron sputtering discharges with graphite target
Linköping Univ, Plasma & Coatings Phys Div, IFM Mat Phys, SE-58183 Linköping, Sweden..
Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany..
KTH, School of Electrical Engineering and Computer Science (EECS), Electrical Engineering, Space and Plasma Physics. Linköping Univ, Plasma & Coatings Phys Div, IFM Mat Phys, SE-58183 Linköping, Sweden..ORCID iD: 0000-0003-1308-9270
Univ Twente, MESA Inst Nanotechnol, Ind Focus Grp XUV Opt, Drienerlolaan 5, NL-7522 NB Enschede, Netherlands..
Show others and affiliations
2021 (English)In: Plasma sources science & technology, ISSN 0963-0252, E-ISSN 1361-6595, Vol. 30, no 11, article id 115017Article in journal (Refereed) Published
Abstract [en]

The ionization region model (IRM) is applied to model a high power impulse magnetron sputtering discharge in argon with a graphite target. Using the IRM, the temporal variation of the various species and the average electron energy, as well as internal parameters such as the ionization probability, back-attraction probability, and the ionized flux fraction of the sputtered species, is determined. It is found that thedischarge develops into working gas recycling and most of the discharge current at the cathode target surface is composed of Ar+ ions, which constitute over 90% of the discharge current, while the contribution of the C+ ions is always small (<5%), even for peak current densities close to 3 A cm(-2). For the target species, the time-averaged ionization probability <alpha(t,pulse)> is low, or 13-27%, the ion back-attraction probability during the pulse <beta(t,pulse)> is high (>92%), and the ionized flux fraction is about 2%. It is concluded that in the operation range studied here it is a challenge to ionize carbon atoms, that are sputtered off of a graphite target in a magnetron sputtering discharge, when depositing amorphous carbon films.

Place, publisher, year, edition, pages
IOP Publishing Ltd , 2021. Vol. 30, no 11, article id 115017
Keywords [en]
magnetron sputtering discharge, graphite, high power impulse magnetron sputtering, carbon
National Category
Fusion, Plasma and Space Physics
Identifiers
URN: urn:nbn:se:kth:diva-306575DOI: 10.1088/1361-6595/ac352cISI: 000725856600001Scopus ID: 2-s2.0-85122424583OAI: oai:DiVA.org:kth-306575DiVA, id: diva2:1621705
Note

QC 20211220

Available from: 2021-12-20 Created: 2021-12-20 Last updated: 2022-09-15Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full textScopus

Authority records

Brenning, NilsRaadu, Michael A.Gudmundsson, Jon Tomas

Search in DiVA

By author/editor
Brenning, NilsRaadu, Michael A.Gudmundsson, Jon Tomas
By organisation
Space and Plasma Physics
In the same journal
Plasma sources science & technology
Fusion, Plasma and Space Physics

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 36 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf