MEMS 2021 Welcome 2021 (English)In: IEEE International Conference on Micro Electro Mechanical Systems, ISSN 1084-6999, Vol. 2021-January, p. i-ii, article id 9375379Article in journal (Refereed) Published

Place, publisher, year, edition, pages

Institute of Electrical and Electronics Engineers Inc. , 2021. Vol. 2021-January, p. i-ii, article id 9375379

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Other Electrical Engineering, Electronic Engineering, Information Engineering

Identifiers

URN: urn:nbn:se:kth:diva-308509DOI: 10.1109/MEMS51782.2021.9375379Scopus ID: 2-s2.0-85103437686OAI: oai:DiVA.org:kth-308509DiVA, id: diva2:1636295

Conference

25 January 2021 through 29 January 2021

Note

QC 20220209

Available from: 2022-02-09 Created: 2022-02-09 Last updated: 2022-06-25Bibliographically approved

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Roxhed, Niclas

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Micro and Nanosystems

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