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Transfer printing of nanomaterials and microstructures using a wire bonder
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-3325-8273
Senseair AB, Färögatan 33, 16451 Kista, Sweden.ORCID iD: 0000-0002-8853-0967
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-8821-6759
Chair of Electronic Devices, Faculty of Electrical Engineering and Information Technology, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany.
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2019 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 29, no 12, article id 125014Article in journal (Refereed) Published
Abstract [en]

Scalable and cost-efficient transfer of nanomaterials and microstructures from their original fabrication substrate to a new host substrate is a key challenge for realizing heterogeneously integrated functional systems, such as sensors, photonics, and electronics. Here we demonstrate a high-throughput and versatile integration method utilizing conventional wire bonding tools to transfer-print carbon nanotubes (CNTs) and silicon microstructures. Standard ball stitch wire bonding cycles were used as scalable and high-speed pick-and-place operations to realize the material transfer. Our experimental results demonstrated successful transfer printing of single-walled CNTs (100 μm-diameter patches) from their growth substrate to polydimethylsiloxane, parylene, or Au/parylene electrode substrates, and realization of field emission cathodes made of CNTs on a silicon substrate. Field emission measurements manifested excellent emission performance of the CNT electrodes. Further, we demonstrated the utility of a high-speed wire bonder for transfer printing of silicon microstructures (60 μm × 60 μm × 20 μm) from the original silicon on insulator substrate to a new host substrate. The achieved placement accuracy of the CNT patches and silicon microstructures on the target substrates were within ± 4 μm. These results show the potential of using established and extremely cost-efficient semiconductor wire bonding infrastructure for transfer printing of nanomaterials and microstructures to realize integrated microsystems and flexible electronics.

Place, publisher, year, edition, pages
Institute of Physics Publishing (IOPP), 2019. Vol. 29, no 12, article id 125014
Keywords [en]
assembly, carbon nanotubes, field emission, flexible electronics, heterogeneous integration, transfer printing, wire bonding
National Category
Manufacturing, Surface and Joining Technology
Identifiers
URN: urn:nbn:se:kth:diva-311499DOI: 10.1088/1361-6439/ab4d1fISI: 000493114400001Scopus ID: 2-s2.0-85076055727OAI: oai:DiVA.org:kth-311499DiVA, id: diva2:1654864
Note

Not duplicate with DiVA 1350648

QC 20220530

Available from: 2022-04-29 Created: 2022-04-29 Last updated: 2022-06-25Bibliographically approved
In thesis
1. Bright Lights: Innovative Micro- and Nano-Patterning for Sensing and Tissue Engineering
Open this publication in new window or tab >>Bright Lights: Innovative Micro- and Nano-Patterning for Sensing and Tissue Engineering
2022 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Light is the primary source of energy on our planet and has been a significant driver in the evolution of human society and technology. Light finds applications in two-dimensional (2D) photolithography and three-dimensional (3D) printing, where a pattern is transferred to a material of interest by ultraviolet (UV) light exposure, and in laser scribing and cutting, where high power lasers are used to pattern the surface of objects or cut through the bulk of the material of interest. However, conventional light-based processing has three main constraints: a) the wavelength of visible light limits resolution, b) only materials that absorb the wavelength in use can be efficiently processed, and c) intense laser light burns its target, degrading the material surrounding the exposed areas and further limiting material compatibility. Overcoming these limitations is the core of this thesis.

The first part of this thesis describes three different patterning methods enabled by intelligent design and non-linear light-matter interaction. The first work reports the use of light at 365 nm to generate sub-20 nm wide nanowires (NWs) exploiting crack lithography, exceeding the possible resolution given by diffraction limit by 10-fold. The second work describes how the non-linear interaction of femtosecond laser pulses with otherwise transparent glass enables nanostructuring of borosilicate coverslips. Positively charging the nanostructured glass surfaces grants a “attract and destroy” bactericidal functionality and maintains the transparency of the substrate, creating a microscopy compatible platform to study bacteria-surface interactions and providing strategies to fight antibiotic-resistant bacteria. The third and fourth works show how femtosecond lasers can directly pattern carbon nanotube films and 2D materials (graphene, molybdenum disulfide, and platinum diselenide) without damaging the substrate or the material surrounding the exposed area. Non-linear interaction with high-energy laser pulses allows sub-300 nm resolution, circumventing the limit given by light diffraction in the linear regime. The combination of high resolution, femtosecond exposure, and ultrafast scanning speed provides a valid alternative to resist-based photolithography while eliminating the related contamination issues for these sensitive materials.

The second part of this thesis describes two different 3D micromachining approaches enabled by high-intensity laser light. The fifth work presents a collagen patterning method based on laser-induced cavitation, called cavitation molding. This method represents a new biomanufacturing mode that is neither additive nor subtractive. In this study, cavitation molding enables the generation of a micro vascularized cancer-on-chip model, consisting of an in-vivo-like spheroidal mass of cancer cells surrounded by artificial blood vessels. In the sixth and final work, we used two-photon polymerization to generate 3D platforms in a biocompatible resin. This platform enables the study of the physiology of neurons and their interaction with astrocyte cells. The low autofluorescence of the printed resins allows optical readout of the neuronal activity by calcium imaging.

Abstract [sv]

Ljus är den primära energikällan på vår planet och har varit en viktig motivation i utvecklingen av det mänskliga samhället och teknologin. Inom mikrotillverkning finner ljus tillämpningar inom fotolitografi och 3D-printing, där ett 2D- eller 3D-mönster överförs till ett material av intresse genom exponering för UV-ljus, och i laserritning och skärning, där högeffektlasrar används för att skapa mönster på föremålets yta eller skära igenom huvuddelen av materialet av intresse. Likväl, har dock konventionell ljusbaserad bearbetning tre huvudbegränsningar: a) våglängden för synligt ljus begränsar upplösningen, b) endast material som absorberar våglängden vid användning kan bearbetas effektivt, och c) intensivt laserljus bränner upp sitt målobjekt, vilket försämrar materialet som omger de exponerade områdena och ytterligare begränsar materialkompatibiliteten. Att övervinna dessa begränsningar är kärnan i denna avhandling.

Den första delen av denna avhandling beskriver tre olika tvådimensionella mönstringsmetoder som möjliggörs av intelligent design och icke-linjär ljus-materia interaktion. Det första arbetet rapporterar användningen av ljus vid 365 nm för att generera sub-20 nm breda nanotrådar (NW) genom att utnyttja cracklitografi, vilket överskrider den möjliga upplösningen som ges av diffraktionsgränsen tiofaldigt. Det andra verket beskriver användningen av femtosekundlaserpulser för att strukturera ytan på glasskivor, som vanligtvis skulle vara transparenta för mindre intensivt synligt ljus. Positiv laddning av de nanostrukturerade glasytorna ger en "sök och förstör" bakteriedödande funktionalitet, vilket möjliggör nya grundläggande studier av interaktioner mellan bakterier och yta och tillhandahåller strategier för att bekämpa antibiotikaresistenta bakterier. Det tredje och fjärde verket visar hur ultrasnabba lasrar selektivt kan mönstra 2D-material – grafen, molybdendisulfid och platinadiselenid – och tunna filmer – kolnanorörsfilm – utan att skada substratet eller materialet som omger det exponerade området. Direkt mönstring med ultrasnabb skanningshastighet ger processskalbarhet och upplösning under 300 nm, vilket ger ett giltigt alternativ till resistbaserad fotolitografi och relaterade kontamineringsproblem för dessa känsliga material.

Den andra delen av denna avhandling beskriver två olika 3D-mikrobearbetningsmetoder som möjliggörs av högintensivt laserljus. Det femte arbetet presenterar en biotillverkningsmetod för att strukturera kollagen baserat på laserinducerad kavitation. Denna metod, kallad kavitationsgjutning, representerar ett nytt biotillverkningsläge som varken är additivt eller subtraktivt. I denna studie möjliggör kavitationsformning genereringen av en mikrovaskulariserad cancer-on-chip-modell, bestående av en in-vivo-liknande sfäroidal massa av cancerceller omgivna av konstgjorda blodkärl. I det sjätte och sista arbetet använde vi två-fotonpolymerisation för att generera icke-cytotoxiska 3D-strukturer för att studera neuronernas fysiologi och deras interaktion med astrocytceller. Den låga autofluorescensen hos de tryckta hartserna tillåter optisk avläsning av den neuronala aktiviteten genom kalciumavbildning.

Place, publisher, year, edition, pages
Kungliga tekniska högskolan, 2022. p. 71
Series
TRITA-EECS-AVL ; 2022:28
Keywords
Micro-electromechanical systems (MEMS), nanotechnology, nanowires, microfabrication, tissue engineering, crack-lithography, direct writing, femtosecond lasers, two-photon polymerization, 3D micromachining, cavitation molding, scalable optical patterning, 2D materials, surface structuring, bacterial-surface interaction.
National Category
Nano Technology Other Medical Engineering Manufacturing, Surface and Joining Technology
Research subject
Electrical Engineering
Identifiers
urn:nbn:se:kth:diva-311503 (URN)978-91-8040-208-8 (ISBN)
Public defence
2022-05-23, F3, Lindstedtsvägen 26 & 28, floor 2, KTH Campus, Stockholm, 10:00 (English)
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Supervisors
Note

QC 20220429

Available from: 2022-04-29 Created: 2022-04-29 Last updated: 2022-09-20Bibliographically approved

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Wang, XiaojingSchröder, StephanEnrico, AlessandroNiklaus, FrankStemme, GöranRoxhed, Niclas

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