Silicon photonic MEMS phase shifter with µs time constant built on a foundry platformShow others and affiliations
2021 (English)In: Optics InfoBase Conference Papers, The Optical Society , 2021Conference paper, Published paper (Refereed)
Abstract [en]
MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2π phase shifter with a 1.54 µs time constant and 0.5 dB insertion loss in IMEC's iSiPP50G platform.
Place, publisher, year, edition, pages
The Optical Society , 2021.
Keywords [en]
Optical fiber communication, Optical fibers, Photonic devices, Silicon photonics, Low Power, MEMS phase shifter, Phase-shifters, Silicon photonic MEMS, Time-constants, Phase shifters
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering Atom and Molecular Physics and Optics Telecommunications
Identifiers
URN: urn:nbn:se:kth:diva-313215Scopus ID: 2-s2.0-85120036612OAI: oai:DiVA.org:kth-313215DiVA, id: diva2:1665325
Conference
CLEO: Science and Innovations, CLEO:S and I 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021, 9 May 2021 through 14 May 2021
Note
Part of proceedings: ISBN 978-1-55752-820-9
Syskonpost
Not duplicate with DiVA 1668277
QC 20220607
2022-06-072022-06-072024-03-18Bibliographically approved