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Inkjet printing, laser-based micromachining, and micro-3D printing technologies for MEMS
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0003-3452-6361
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-0525-8647
2020 (English)In: Handbook of Silicon Based MEMS Materials and Technologies, Elsevier BV , 2020, p. 531-545Chapter in book (Other academic)
Abstract [en]

A number of unconventional micromachining technologies are emerging that are of potential interest for microelectromechanical systems (MEMS) manufacturing. Such micromachining processes include sequential processes in which devices on a substrate are formed one at a time, which is in contrast to conventional parallel semiconductor manufacturing processes. Nevertheless, many of the serial micromachining processes, including inkjet printing technologies and laser-based processes can be highly efficient and cost competitive, especially for low- and medium-sized manufacturing volumes as well as for prototyping purposes. The technologies presented in this chapter can be categorized as additive micromachining approaches (e.g., inkjet printing) and subtractive micromachining approaches (e.g., laser ablation). This chapter discusses the more mature technologies that are already being developed in a commercial context and a number of new and emerging micromachining approaches that are still in the early research and development stage. 

Place, publisher, year, edition, pages
Elsevier BV , 2020. p. 531-545
Keywords [en]
Etching, Focused ion beam milling and e-beam-assisted deposition, Inkjet printing, Laser ablation, Laser writing, Micro-laser sintering, Micromachining, Microstereolithography
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering Condensed Matter Physics Other Engineering and Technologies
Identifiers
URN: urn:nbn:se:kth:diva-313887DOI: 10.1016/B978-0-12-817786-0.00021-9Scopus ID: 2-s2.0-85124857797OAI: oai:DiVA.org:kth-313887DiVA, id: diva2:1668467
Note

Part of proceedings: ISBN 9780128177860, QC 20220613

Available from: 2022-06-13 Created: 2022-06-13 Last updated: 2025-02-18Bibliographically approved

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Fischer, Andreas C.Niklaus, Frank

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CiteExportLink to record
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Citation style
  • apa
  • ieee
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  • vancouver
  • Other style
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