Scalable Nano-Opto-Electromechanical Systems in Silicon PhotonicsShow others and affiliations
2021 (English)In: 2021 IEEE Photonics Conference, IPC 2021 - Proceedings, Institute of Electrical and Electronics Engineers (IEEE) , 2021Conference paper, Published paper (Refereed)
Abstract [en]
Recent advances in integration of Nano-Opto-Electromechanical Systems in Silicon Photonics enable fundamental photonic operations such as switching, phase shifting or power equalization on-chip. The unique combination of high optical efficiency, low electric power consumption and compact footprint, provides outstanding opportunities in scalability to large-scale photonic integrated circuits.
Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE) , 2021.
Keywords [en]
NOEMS, Photonic Integrated Circuits, Photonic MEMS, Silicon Photonics, Energy efficiency, Photonic integration technology, Timing circuits, Electric power consumption, Electromechanical systems, On chips, Optical efficiency, Phase-shifting, Photonics Integrated Circuits, Power equalization, Photonic devices
National Category
Atom and Molecular Physics and Optics Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-316405DOI: 10.1109/IPC48725.2021.9593009ISI: 000866488100167Scopus ID: 2-s2.0-85123176392OAI: oai:DiVA.org:kth-316405DiVA, id: diva2:1687800
Conference
2021 IEEE Photonics Conference, IPC 2021, Virtual/Online, 18-21 October 2021
Note
Part of proceedings: ISBN 978-1-6654-1601-6
QC 20220816
2022-08-162022-08-162022-11-14Bibliographically approved