Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform 2021 (English)In: 2021 Conference On Lasers And Electro-Optics (CLEO), IEEE , 2021, article id STu2Q.1Conference paper, Published paper (Refereed)

Abstract [en]

MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2 pi phase shifter with a 1.54 mu s time constant and 0.5 dB insertion loss in IMEC's iSiPP5OG platform.

Place, publisher, year, edition, pages

IEEE , 2021. article id STu2Q.1

Series

Conference on Lasers and Electro-Optics, ISSN 2160-9020

National Category

Other Electrical Engineering, Electronic Engineering, Information Engineering Production Engineering, Human Work Science and Ergonomics Manufacturing, Surface and Joining Technology

Identifiers

URN: urn:nbn:se:kth:diva-318235ISI: 000831479802308OAI: oai:DiVA.org:kth-318235DiVA, id: diva2:1697077

Conference

Conference on Lasers and Electro-Optics (CLEO), MAY 09-14, 2021, ELECTR NETWORK

Note

Part of proceedings: ISBN 978-1-943580-91-0, QC 20220920

Available from: 2022-09-20 Created: 2022-09-20 Last updated: 2022-09-20Bibliographically approved

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Edinger, PierreKristinsson, KristóferErrando-Herranz, CarlosGylfason, Kristinn

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Edinger, PierreKristinsson, KristóferErrando-Herranz, CarlosGylfason, Kristinn

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Other Electrical Engineering, Electronic Engineering, Information EngineeringProduction Engineering, Human Work Science and ErgonomicsManufacturing, Surface and Joining Technology

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