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Large-Sized Nanocrystalline Ultrathin β-Ga2 O3 Membranes Fabricated by Surface Charge Lithography
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2022 (English)In: Nanomaterials, E-ISSN 2079-4991, Vol. 12, no 4, article id 689Article in journal (Refereed) Published
Abstract [en]

Large-sized 2D semiconductor materials have gained significant attention for their fascinat-ing properties in various applications. In this work, we demonstrate the fabrication of nanoperforated ultrathin β-Ga2 O3 membranes of a nanoscale thickness. The technological route includes the fabrication of GaN membranes using the Surface Charge Lithography (SCL) approach and subsequent thermal treatment in air at 900◦ C in order to obtain β-Ga2 O3 membranes. The as-grown GaN membranes were discovered to be completely transformed into β-Ga2 O3, with the morphology evolving from a smooth topography to a nanoperforated surface consisting of nanograin structures. The oxidation mechanism of the membrane was investigated under different annealing conditions followed by XPS, AFM, Raman and TEM analyses. 

Place, publisher, year, edition, pages
MDPI AG , 2022. Vol. 12, no 4, article id 689
Keywords [en]
Phase transformation, Surface Charge Lithography, Ultrathin nanomembranes, β-Ga2 O3
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:kth:diva-320819DOI: 10.3390/nano12040689ISI: 000925958700001PubMedID: 35215016Scopus ID: 2-s2.0-85124963842OAI: oai:DiVA.org:kth-320819DiVA, id: diva2:1708907
Note

QC 20221107

Available from: 2022-11-07 Created: 2022-11-07 Last updated: 2023-09-21Bibliographically approved

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Fei, YeDutta, JoydeepLinnros, Jan

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