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Low-Temperature Bonding of Nanolayered InGaP/SiO2Waveguides for Spontaneous-Parametric Down Conversion
KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum and Biophotonics.ORCID iD: 0000-0001-6616-4997
KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum and Biophotonics.ORCID iD: 0000-0003-2136-4914
2022 (English)In: ACS Applied Nano Materials, E-ISSN 2574-0970, Vol. 5, no 2, p. 2550-2557Article in journal (Refereed) Published
Abstract [en]

The integration of III-V materials on photonic integrated circuits has enjoyed a lot of attention because of the necessity of merging photon sources with silicon electronics. Nevertheless, III-V source integration technologies are not sufficiently mature, inhibiting the employment of such platforms to a broader range of applications. Here, we present a novel approach that enables the transfer of III-V nanolayers (≈250 nm) to silicates via oxide bonding. Through use of a thick photoresist scaffold (≈30 μm), complete removal of the substrate can be performed while preserving the relative structure morphology. The use of the III-V native oxide without depositing interfacial oxide layers greatly reduces the processing time and cost. The transfer of an array composed of 1 mm long InGaP waveguides with 250 nm thickness and widths spanning from 0.7 to 11.2 μm to a SiO2substrate has been experimentally demonstrated, evidencing the feasibility of the technique for wafer-scale processing. The application of the nanolayered waveguides in the spontaneous-parametric down-conversion process has been tested by photon-correlation measurement, showing good agreement with the theoretical model. 

Place, publisher, year, edition, pages
American Chemical Society (ACS) , 2022. Vol. 5, no 2, p. 2550-2557
Keywords [en]
heterogeneous integration, III-V bonding, III-V transfer, InGaP, low-Temperature bonding, semiconductor nanowaveguides, SPDC, Integration, Morphology, Photons, Semiconducting indium gallium arsenide, Semiconductor alloys, Silicates, Silicon wafers, Substrates, Temperature, Wafer bonding, Waveguides, Low temperature bonding, Nanowaveguides, Photon sources, Photonics Integrated Circuits, Semiconductor nanowaveguide, Spontaneous parametric down-conversion, Silica
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URN: urn:nbn:se:kth:diva-321192DOI: 10.1021/acsanm.1c04202ISI: 000758091300001Scopus ID: 2-s2.0-85125121060OAI: oai:DiVA.org:kth-321192DiVA, id: diva2:1709601
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QC 20221109

Available from: 2022-11-09 Created: 2022-11-09 Last updated: 2023-07-17Bibliographically approved

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Peralta, AlbertSwillo, Marcin

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