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High-resolution Terahertz near-field measurements for 2D-material inspection in reflection-mode geometry
Protemics GmbH, Aachen, Germany.;Rhein Westfal TH Aachen, Aachen, Germany..
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0003-3936-818x
Protemics GmbH, Aachen, Germany..
Rhein Westfal TH Aachen, Aachen, Germany..
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2022 (English)In: 2022 47TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ 2022), Institute of Electrical and Electronics Engineers (IEEE) , 2022Conference paper, Published paper (Refereed)
Abstract [en]

Terahertz (THz) inspection is a versatile tool for the non-destructive, quantitative characterization of conductive thin-films, including 2D-materials such as graphene. In this work, we apply high-resolution THz near-field transceiver probe-tips for the inspection of graphene-layers in reflection-mode. By taking advantage of the additional interface-selectivity of the reflectionmode not available in transmission-mode, we can now directly discern substrate- from top-layer inhomogeneity, which is important for the reliable 2D-layer characterization on inhomogeneous substrates.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE) , 2022.
Series
International Conference on Infrared Millimeter and Terahertz Waves, ISSN 2162-2027
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-322232DOI: 10.1109/IRMMW-THz50927.2022.9895998ISI: 000865953000480Scopus ID: 2-s2.0-85139846220OAI: oai:DiVA.org:kth-322232DiVA, id: diva2:1716212
Conference
47th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz), AUG 28-SEP 02, 2022, Delft, NETHERLANDS
Note

Part of proceedings: ISBN 978-1-7281-9427-1

QC 20221205

Available from: 2022-12-05 Created: 2022-12-05 Last updated: 2022-12-05Bibliographically approved

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Quellmalz, Arne

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