kth.sePublications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process
Ecole Polytech Fed Lausanne, Lausanne, Switzerland.;Swiss Ctr Elect & Microtechnol CSEM, CH-2002 Neuchatel, Switzerland..
Ecole Polytech Fed Lausanne, Lausanne, Switzerland..
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-7339-6662
Interuniv Microelect Ctr, Leuven, Belgium..
Show others and affiliations
2022 (English)In: JOURNAL OF OPTICAL MICROSYSTEMS, ISSN 2708-5260, Vol. 2, no 04Article in journal (Refereed) Published
Abstract [en]

Photonic add-drop filters are crucial components for the implementation of wavelength division multiplexing (WDM) in fiber-optic communication systems. The recent progress in photonic integration has shown the potential to integrate photonic add-drop filters alongside high-performance photonic building blocks on a chip to construct compact and complex photonic-integrated circuits for WDM. Typically, implementations are based on micro-ring resonators with integrated heaters or free carrier dispersion-based modulators to adjust the filter wavelength. However, heaters suffer from high power consumption, and free carriers result in optical absorption losses, limiting the scalability toward very-large-scale circuits. We demonstrate the design, simulation, fabrication, and experimental characterization of a compact add-drop filter based on a vertically movable, MEMS-actuated ring resonator. The MEMSactuated add-drop filter is implemented in IMEC's iSiPP50G silicon photonics platform and realized using a short post-processing flow to safely release the suspended MEMS structures in a wafer-level compatible process. The filter exhibits a through port linewidth of similar to 1 nm (124.37 GHz) at 1557.1 nm, and it retains a port extinction of 20 dB and a port isolation of > 50 dB under 27 V of actuation voltage. The combination of low-power consumption and a compact footprint demonstrates the suitability for very-large-scale integration in photonic circuits.

Place, publisher, year, edition, pages
SPIE-Intl Soc Optical Eng , 2022. Vol. 2, no 04
Keywords [en]
integrated optics, silicon photonics, microelectromechanical systems, add-drop filter, wavelength division multiplexing, actuation
National Category
Telecommunications
Identifiers
URN: urn:nbn:se:kth:diva-323914DOI: 10.1117/1.JOM.2.4.044001ISI: 000908435100003Scopus ID: 2-s2.0-85183871353OAI: oai:DiVA.org:kth-323914DiVA, id: diva2:1739687
Note

QC 20230227

Available from: 2023-02-27 Created: 2023-02-27 Last updated: 2024-07-11Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full textScopus

Authority records

Edinger, PierreGylfason, Kristinn

Search in DiVA

By author/editor
Edinger, PierreGylfason, Kristinn
By organisation
Micro and Nanosystems
Telecommunications

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 78 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf