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Sub-THz Single-Pole-Single-Thru Microelectromechanical Switch
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems. (THz Group)ORCID iD: 0000-0001-5048-2296
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-8264-3231
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0003-3339-9137
2023 (English)Conference paper, Oral presentation with published abstract (Refereed)
Abstract [en]

This paper presents a novel wideband single-pole-single-thru (SPST) switch fabricated by silicon micromachining and operates based on short-circuiting the dominant mode of the rectangular waveguide. The switch has a compact footprint, with a total size of 2×3.5×1.2 mm. The switching mechanism is implemented by a microelectromechanical (MEMS) actuator with an actuation voltage of ~40 V. It has two operating states of propagating and blocking mode. The measured return loss and insertion loss of the switch are 17 dB and 0.7-1.1 dB at 220-290 GHz in the propagating state. The presented switch also has tuning capability to operate with 20 dB return loss at 220-266 GHz. The measured isolation is also 28.5-32.5 dB in the blocking state at the same frequency span.

Place, publisher, year, edition, pages
2023.
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-327638OAI: oai:DiVA.org:kth-327638DiVA, id: diva2:1760799
Conference
Swedish Microwave Days, KTH, Stockholm, 23-25 May 2023
Note

QC 20231122

Available from: 2023-05-31 Created: 2023-05-31 Last updated: 2023-11-22Bibliographically approved

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fulltext(445 kB)72 downloads
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Karimi, ArminShah, UmerOberhammer, Joachim

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CiteExportLink to record
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