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Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems. Beijing Inst Technol, Adv Res Inst Multidisciplinary Sci, Beijing 100081, Peoples R China.ORCID iD: 0000-0002-8811-1615
Ecole Polytech Fed Lausanne EPFL, Adv NEMS Grp, CH-1015 Lausanne, Switzerland..
Beijing Inst Technol, Sch Integrated Circuits & Elect, Beijing 100081, Peoples R China..
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0001-9008-8402
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2023 (English)In: ACS Applied Nano Materials, E-ISSN 2574-0970, Vol. 7, no 1, p. 102-109Article in journal (Refereed) Published
Abstract [en]

The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.

Place, publisher, year, edition, pages
American Chemical Society (ACS) , 2023. Vol. 7, no 1, p. 102-109
Keywords [en]
graphene, resonators, suspendedgraphene, nonlinear resonance, NEMS
National Category
Other Engineering and Technologies
Identifiers
URN: urn:nbn:se:kth:diva-342871DOI: 10.1021/acsanm.3c03642ISI: 001143432000001PubMedID: 38229663Scopus ID: 2-s2.0-85179790991OAI: oai:DiVA.org:kth-342871DiVA, id: diva2:1833564
Note

QC 20240201

Available from: 2024-02-01 Created: 2024-02-01 Last updated: 2024-02-06Bibliographically approved

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Fan, XugeGylfason, KristinnNiklaus, Frank

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