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NbN thin films grown on silicon by molecular beam epitaxy for superconducting detectors
KTH, School of Engineering Sciences (SCI), Applied Physics.ORCID iD: 0000-0002-0367-687x
Univ Cote Azur, CNRS, CRHEA, Sophia Antipolis, France..
KTH, School of Engineering Sciences (SCI), Applied Physics.
Univ Cote Azur, CNRS, CRHEA, Sophia Antipolis, France..
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2023 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 123, no 25, article id 252602Article in journal (Refereed) Published
Abstract [en]

Superconducting nanowire single photon detectors (SNSPDs) made with thin NbN films can reach high performances. While sputtering has been the deposition method of choice, here, we show that ammonia-molecular beam epitaxy (NH3-MBE) can produce pertinent epitaxial cubic NbN thin films on silicon substrates using an AlN buffer. Despite granular morphology and a high density of grain boundaries as well as the presence of rotational twins, Tc = 12.7 K for a 5.6 nm thick film and saturation of internal detection efficiency up to 850 nm are achieved. Morphology and stoichiometry as well as strain have a strong impact on the detector properties, highlighting the importance of a precise control of the growth parameters. These results pave the way for high fabrication yield of SNSPDs on large-scale silicon wafers using epitaxial NbN thin films grown by MBE.

Place, publisher, year, edition, pages
AIP Publishing , 2023. Vol. 123, no 25, article id 252602
National Category
Materials Chemistry
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URN: urn:nbn:se:kth:diva-342860DOI: 10.1063/5.0175699ISI: 001130453400019Scopus ID: 2-s2.0-85180157965OAI: oai:DiVA.org:kth-342860DiVA, id: diva2:1833580
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QC 20240201

Available from: 2024-02-01 Created: 2024-02-01 Last updated: 2024-02-01Bibliographically approved

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Iovan, AdrianDescamps, ThomasZwiller, Val

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