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Simulation and Characterization of the Modulation Transfer Function in Fully Delineated Type-II Superlattices Infrared Detectors
KTH, School of Electrical Engineering and Computer Science (EECS), Electrical Engineering, Electronics and Embedded systems.ORCID iD: 0000-0002-7452-0565
IRnova AB, Stockholm, Sweden.ORCID iD: 0000-0002-5895-1146
IRnova AB, Stockholm, Sweden.ORCID iD: 0000-0002-5007-6893
IRnova AB, Stockholm, Sweden.
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2024 (English)In: IEEE Transactions on Electron Devices, ISSN 0018-9383, E-ISSN 1557-9646, Vol. 71, no 4, p. 2459-2464Article in journal (Refereed) Published
Abstract [en]

The modulation transfer function (MTF) in fully delineated 15 μ m pitch type-II superlattice (T2SL) mid-wave infrared (IR) detectors is studied theoretically and experimentally. Theoretically, a 2-D model to simulate the spot scan (SS) profile is presented and used to compute the MTF as a function of the wavelength and the array geometry (pitch size, trench width). The dependence of the detector trench on the MTF is also evaluated experimentally by the edge spread function (ESF) method according to the ISO12233 standard. The experimental results show an excellent agreement with the theoretical model, reporting an MTF of 0.61 and 0.60 at the Nyquist frequency for 1 and 2 μ m trench, respectively. With the simulation model, the effect of the increased optical crosstalk for smaller pixel pitch is discussed as a function of the trench width (0.5, 1, and 2 μ m) and incidence angle up to ± 30 ∘ . Simulation results show MTF values at the Nyquist frequency between 0.61–0.62, 0.58–0.60, and 0.55–0.57 with an average degradation of 1%, 2%, and 7% at an angle of ± 30 ∘ compared to normal incidence for the 10, 7.5, and 5 μ m pitch, respectively.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE) , 2024. Vol. 71, no 4, p. 2459-2464
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-343589DOI: 10.1109/ted.2024.3361409ISI: 001164062200001Scopus ID: 2-s2.0-85187266193OAI: oai:DiVA.org:kth-343589DiVA, id: diva2:1839503
Note

QC 20240221

Available from: 2024-02-21 Created: 2024-02-21 Last updated: 2025-03-12Bibliographically approved
In thesis
1. Process development of III-V-based infrared detectors
Open this publication in new window or tab >>Process development of III-V-based infrared detectors
2024 (English)Doctoral thesis, comprehensive summary (Other academic)
Alternative title[sv]
Processutveckling av III-V-baserade infraröda detektorer
Abstract [en]

Type-II Superlattice (T2SL) detectors have revolutionized the field of infraredimaging, establishing themselves as the forefront technology in defense, space,and industrial applications. These detectors enable larger formats and higheroperating temperatures (HOT) that minimize the need for bulky and energyconsumingcryogenic cooling, paving the way for imaging systems with reducedSize, Weight, and Power (SWaP).Their versatility across various IR wavebands—long-wavelength, midwavelength,and extended short-wavelength—combined with the intrinsicscalability characteristic of III-V detectors, positions T2SL technology as the idealchoice for next-generation HOT and high-resolution (HD) detectors.This thesis focuses on improving the manufacturing process for T2SL arrays toreduce surface leakage currents induced during pixel etching. This challengebecomes more pronounced with smaller pixels and directly affects the maximumoperating temperature.The investigation into T2SL detector performance provides comprehensiveinsights into the detectors' electrical characteristics. This includes 1/f noiseanalysis and a detailed experimental and quantitative modeling of surface leakagecurrents, proposing strategies for their reduction. Furthermore, the study delvesinto light-matter interactions within focal plane arrays (FPAs) to describe opticalconcentration effects to increase the sensitivity and provides Modulation transferfunction measurements and simulations to discuss the resolution of T2SL arrays.Employing diverse Sb-based T2SL detector photodiode structures, this thesisreports significant progress in the fabrication process, leading to remarkableachievements. These include the demonstration and industrial production of a640 × 512 – 15 μm format FPA operating at 150 K; the production of 10, 7.5,and 5 μm pitch arrays, all capable of functioning at 150 K; and the demonstrationof small-pitch HD FPAs, with the capability of operating at 150K.

Abstract [sv]

Typ-II Supergitter (T2SL) detektorer har revolutionerat fältet för infraröd (IR)avbildning och etablerat sig som spetsteknologi inom försvar, rymd ochindustriella tillämpningar. Dessa detektorer möjliggör större format och högrearbetstemperaturer (HOT) som minskar behovet av plats- och energikrävandekryogen kylning, vilket banar väg för IR-kameror med minskad Storlek, Vikt ochEnergiåtgång (SWaP).Deras mångsidighet över olika IR-våglängdsband—långvåg, mellanvåg ochkortvåg—kombinerat med den inneboende skalbarheten som är karakteristisk förIII-V material, positionerar T2SL-teknologin som det ideala valet för nästagenerations HOT och högupplösta (HD) detektorer.Denna avhandling fokuserar på att förbättra tillverkningsprocessen för T2SLdetektormatriserför att minska ytströmmar som uppstår vid pixeletsning. Dennautmaning växer med minskad pixelstorlek och påverkar direkt en detektorsmaximala arbetstemperatur.Genom att betrakta T2SL-detektorernas prestanda ges omfattande insikter idetektorernas elektriska egenskaper. Detta inkluderar analys av 1/f-brus och endetaljerad experimentell och kvantitativ modellering av ytströmmar, samt förslagpå strategier för att reducera dessa. Vidare går studien in på fenomenet av optiskkoncentration som uppstår i fokalplansmatriser (FPAer) och resulterar i ett ökatsignal-brusförhållande. Slutligen analyseras graden av optiska och elektriskaläckage mellan närliggande pixlar genom mätning och simulering avmoduleringsöverföringsfunktionen.Denna avhandling presenterar betydande framsteg i tillverkningsprocessen hosflera olika T2SL-detektorstrukturer vilket resulterat i anmärkningsvärda stegframåt för IR-detektorteknologin. Dessa inkluderar industriell produktion avFPAer med 640 × 512 pixlar med 15 μm:s pixelstorlek och med enarbetstemperatur på 150 K; produktionen av detektormatriser med 10, 7.5, och 5μm pixel-till-pixelavstånd, alla kapabla att fungera vid 150 K; och demonstrationav HD FPAer, med förmåga att fungera vid 150 K.

Place, publisher, year, edition, pages
Stockholm, Sweden: KTH Royal Institute of Technology, 2024. p. 191
Series
TRITA-EECS-AVL ; 2024:18
Keywords
infrared detectors, Type-II superlattice, surface leakage, high operating temperature, passivation, optical concentration, modulation transfer function, noise., infraröda detektorer, Typ-II supergitter, ytströmmar, hög arbetstemperatur, passivering, optisk koncentration, moduleringsöverföringsfunktion, brus
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Information and Communication Technology
Identifiers
urn:nbn:se:kth:diva-343591 (URN)978-91-8040-847-9 (ISBN)
Public defence
2024-03-13, Electrum, Sal C, Kistagången 16, Stockholm, 13:00 (English)
Opponent
Supervisors
Note

QC 20240221

Available from: 2024-02-21 Created: 2024-02-21 Last updated: 2024-02-21Bibliographically approved

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Ramos Santesmases, DavidHellström, Per-Erik

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