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A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-7339-6662
Ecole Polytechnique Fédérale de Lausanne, Switzerland.
Tyndall National Institute of Technology, Cork, Ireland.
Interuniversity Microelectronics Centre, Leuven, Belgium.
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2023 (English)In: Integrated Photonics Research, Silicon and Nanophotonics in Proceedings Advanced Photonics Congress 2023 - Part of Advanced Photonics Congress 2023, Optica Publishing Group , 2023Conference paper, Published paper (Refereed)
Abstract [en]

Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry platform.
Place, publisher, year, edition, pages
Optica Publishing Group , 2023.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-346533DOI: 10.1364/IPRSN.2023.ITu1A.2Scopus ID: 2-s2.0-85192363838OAI: oai:DiVA.org:kth-346533DiVA, id: diva2:1858449
Conference
2023 Integrated Photonics Research, Silicon and Nanophotonics, IPR 2023 in Advanced Photonics Congress - Part of Advanced Photonics Congress 2023, Busan, Korea, Jul 9 2023 - Jul 13 2023
Note

QC 20240522

Part of ISBN 978-1-957171-26-5

Available from: 2024-05-16 Created: 2024-05-16 Last updated: 2025-01-13Bibliographically approved

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fulltext(566 kB)16 downloads
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Edinger, PierreGylfason, Kristinn

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CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
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