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3d Printing of Silica-HSQ Composites with Sub-Micrometer Resolution and Selectively Generated Silicon Nanocrystals
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-7659-842X
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0003-1112-3308
Universität der Bundeswehr Munich, Institute of Physics, Neubiberg, Germany.
Universität der Bundeswehr Munich, Institute of Physics, Neubiberg, Germany.
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2023 (English)In: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Institute of Electrical and Electronics Engineers Inc. , 2023, p. 433-436Conference paper, Published paper (Refereed)
Abstract [en]

Silica glass is a high-performance material that has become essential in modern life. Functionalization of silica glass is critically important for its optical applications such as in lenses and filters, which is however challenging to realize and manipulate in 3D-printed silica glass. Here, we report 3D printing of solid composites of silica glass and hydrogen silsesquioxane (HSQ) with sub-micrometer resolution. This is achieved by encapsulating HSQ inside silica glass by selectively transforming HSQ to silica glass by multi-photon absorption using a femtosecond laser. Furthermore, we demonstrated selective generation of photoluminescent silicon nanocrystals in the HSQ regions inside the composites by annealing. This is based on our experimental observation that the silica glass transformed from HSQ by multi-photon absorption, unlike HSQ, does not generate silicon nanocrystals upon annealing.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers Inc. , 2023. p. 433-436
Keywords [en]
Hydrogen Silsesquioxane, Silica Glass, Silicon Nanocrystals, Three-Dimensional Printing
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-347134Scopus ID: 2-s2.0-85193461198OAI: oai:DiVA.org:kth-347134DiVA, id: diva2:1864383
Conference
22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Kyoto, Japan, Jun 25 2023 - Jun 29 2023
Note

QC 20240610

Part of ISBN 978-488686435-2

Available from: 2024-06-03 Created: 2024-06-03 Last updated: 2024-06-10Bibliographically approved

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Huang, Po-HanLaakso, MikuStemme, GöranGylfason, KristinnNiklaus, Frank

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