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Digital Nanoelectromechanical Non-Volatile Memory Cell
Univ Bristol, Sch Elect Elect & Mech Engn, Bristol BS8 1TH, England..
Univ Bristol, Sch Elect Elect & Mech Engn, Bristol BS8 1TH, England..
Univ Bristol, Sch Elect Elect & Mech Engn, Bristol BS8 1TH, England..
Univ Bristol, Sch Elect Elect & Mech Engn, Bristol BS8 1TH, England..
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2024 (English)In: IEEE Electron Device Letters, ISSN 0741-3106, E-ISSN 1558-0563, Vol. 45, no 4, p. 728-731Article in journal (Refereed) Published
Abstract [en]

Nanoelectromechanical relays are inherently radiation hard and can operate at high temperatures. Thus, they have potential to serve as the building blocks in non-volatile memory that can be used in harsh environments with zero standby power. However, a reprogrammable memory cell built entirely from relays that can be operated with a digital protocol has not yet been demonstrated. Here, we demonstrate a fully mechanical digital non-volatile memory cell built from in-plane silicon nanoelectromechanical relays; a 7-terminal bistable relay utilizes surface adhesion forces to store binary data without consuming any energy, while 3-terminal relays are used for read and write access without the need for CMOS. We have optimized the designs to prevent collapse to the substrate under actuation and recorded voltages of 13, 13.2 and 27V for programming, read and reprogramming operations. This non-volatile memory cell can potentially be used to build embedded memories for edge applications that have stringent temperature, radiation and energy constraints.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE) , 2024. Vol. 45, no 4, p. 728-731
Keywords [en]
Non-volatile memory, nanoelectromechanical relay, low-power, high temperature, radiation hard
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-350485DOI: 10.1109/LED.2024.3362956ISI: 001194155100003Scopus ID: 2-s2.0-85184823058OAI: oai:DiVA.org:kth-350485DiVA, id: diva2:1884257
Note

QC 20240715

Available from: 2024-07-15 Created: 2024-07-15 Last updated: 2024-07-22Bibliographically approved

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Li, YingyingBleiker, Simon J.Niklaus, Frank

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Li, YingyingBleiker, Simon J.Niklaus, FrankPamunuwa, Dinesh
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Micro and Nanosystems
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