An integrated silicon pressure-shear stress sensor has been designed, fabricated and tested in a turbulent wall-boundary layer. The piezoresistive pressure sensor is based on polysilicon diaphragm technology and the thermal shear stress sensor on the gas cooling of a polyimide insulated heated chip. The pressure sensor diaphragm area is 100 * 100 pm, the top-area of the shear stress sensor hot chip is 300 * 60 pm and the edge-to-edge distance between the two areas is 100 pm. The measured steady-state power dissipation of the shear stress sensor in a turbulent wall-boundary layer at an overtemperature of 100°C was P = 42 + 1.1 τ0.500 mW where τ0 is the time-average wall shear stress. The new integrated sensor has been applied for the simultaneous measurement of fluctuating pressure and shear stress in a flat plate boundary layer at a Reynolds number range of 4.9 * 103 < Re θ < 1.0 * 104. Pressure-shear stress correlation coefficients were found between 0.40 and 0.50 for the parallel, and between 0.20 and 0.25 for the perpendicular configuration to the mean flow.
Part of ISBN 9780791815410
QC 20240718