kth.sePublications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
High power impulse magnetron sputtering of a zirconium target
Univ Iceland, Sci Inst, Dunhaga 3, IS-107 Reykjavik, Iceland..
Linköping Univ, Plasma & Coatings Phys Div, IFM Mat Phys, SE-58183 Linköping, Sweden.
Univ Iceland, Sci Inst, Dunhaga 3, IS-107 Reykjavik, Iceland.
Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany.
Show others and affiliations
2024 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 42, no 4, article id 043007Article in journal (Refereed) Published
Abstract [en]

High power impulse magnetron sputtering (HiPIMS) discharges with a zirconium target are studied experimentally and by applying the ionization region model (IRM). The measured ionized flux fraction lies in the range between 25% and 59% and increases with increased peak discharge current density ranging from 0.5 to 2 A/cm(2) at a working gas pressure of 1 Pa. At the same time, the sputter rate-normalized deposition rate determined by the IRM decreases in accordance with the HiPIMS compromise. For a given discharge current and voltage waveform, using the measured ionized flux fraction to lock the model, the IRM provides the temporal variation of the various species and the average electron energy within the ionization region, as well as internal discharge parameters such as the ionization probability and the back-attraction probability of the sputtered species. The ionization probability is found to be in the range 73%-91%, and the back-attraction probability is in the range 67%-77%. Significant working gas rarefaction is observed in these discharges. The degree of working gas rarefaction is in the range 45%-85%, higher for low pressure and higher peak discharge current density. We find electron impact ionization to be the main contributor to working gas rarefaction, with over 80% contribution, while kick-out by zirconium atoms and argon atoms from the target has a smaller contribution. The dominating contribution of electron impact ionization to working gas rarefaction is very similar to other low sputter yield materials.

Place, publisher, year, edition, pages
American Vacuum Society , 2024. Vol. 42, no 4, article id 043007
National Category
Fusion, Plasma and Space Physics
Identifiers
URN: urn:nbn:se:kth:diva-352277DOI: 10.1116/6.0003647ISI: 001284541900002Scopus ID: 2-s2.0-85196369124OAI: oai:DiVA.org:kth-352277DiVA, id: diva2:1892856
Note

QC 20240828

Available from: 2024-08-28 Created: 2024-08-28 Last updated: 2024-08-28Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full textScopus

Authority records

Gudmundsson, Jon Tomas

Search in DiVA

By author/editor
Lundin, DanielGudmundsson, Jon Tomas
By organisation
Space and Plasma Physics
In the same journal
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
Fusion, Plasma and Space Physics

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 56 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf