We use the principles of cavity optomechanics to design a resonant mechanical force sensor for atomic force microscopy. The sensor is based on a type of electromechanical coupling, dual to traditional capacitive coupling, whereby the motion of a cantilever induces surface strain that causes a change in the kinetic inductance of a superconducting nanowire. The cavity is realized by a compact microwave-plasma mode with an equivalent LC circuit involving the kinetic inductance of the nanowire. The device is fully coplanar and we show how to transform the cavity impedance for optimal coupling to the transmission line and the following amplifier. For the device presented here, we estimate the bare kinetic inductive mechanoelectric coupling (KIMEC) rate g0/2π in the range 3–10 Hz. We demonstrate phase-sensitive detection of cantilever motion using a multifrequency pumping and measurement scheme.

We describe a transducer for low-temperature atomic force microscopy based on electromechanical coupling due to a strain-dependent kinetic inductance of a superconducting nanowire. The force sensor is a bending triangular plate (cantilever) whose deflection is measured via a shift in the resonant frequency of a high-Q superconducting microwave resonator at 4.5 GHz. We present design simulations including mechanical finite-element modeling of surface strain and electromagnetic simulations of meandering nanowires with large kinetic inductance. We discuss a lumped-element model of the force sensor and describe the role of an additional shunt inductance for tuning the coupling to the transmission line used to measure the microwave resonance. A detailed description of our fabrication is presented, including information about the process parameters used for each layer. We also discuss the fabrication of sharp tips on the cantilever using focused electron beam-induced deposition of platinum. Finally, we present measurements that characterize the spread of mechanical resonant frequency, the temperature dependence of the microwave resonance, and the sensor’s operation as an electromechanical transducer of force.

We study the response of several microwave resonators made from superconducting NbTiN thin-film meandering nanowires with large kinetic inductance, having different circuit topology and coupling to the transmission line. Reflection measurements reveal the parameters of the circuit and analysis of their temperature dependence in the range 1.7-6 K extract the superconducting energy gap and critical temperature. The lumped-element LC resonator, valid in our frequency range of interest, allows us to predict the quasiparticle contribution to internal loss, independent of circuit topology and characteristic impedance. Our analysis shows that the internal quality factor is limited not by thermal-equilibrium quasiparticles, but an additional temperature-dependent source of internal microwave loss. 

Electromechanical transduction gain of 21 dB is realized in a micro-cantilever resonant force sensor operated in the unresolved-sideband regime. Strain-dependent kinetic inductance weakly couples cantilever motion to a superconducting nonlinear resonant circuit. A single pump generates motional sidebands and parametrically amplifies them via four-wave mixing. We study the gain and added noise, and we analyze potential benefits of this integrated amplification process in the context force sensitivity.

We study force-gradient sensing with a coherently driven mechanical resonator and phase-sensitive detection of motion through the two-Tone backaction evading measurement of cavity optomechanics. The response of the optomechanical system, solved by numerical integration of the classical equations of motion, shows an extended region which is monotonic to changes in force gradient. We use Floquet theory to model the fluctuations, which rise only slightly above that of the usual backaction evading measurement in the presence of the mechanical drive. The monotonic response and minimal backaction are advantageous for applications such as atomic force microscopy.