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Process development for the Integration of III-V photonic devices into a CMOS process
KTH, School of Electrical Engineering and Computer Science (EECS).
2024 (English)Independent thesis Advanced level (degree of Master (Two Years)), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

Silicon photonics has the potential to revolutionize the electronics industry by integrating photonic functions with conventional electronic circuits on a single chip. Despite signif- icant advancements since its introduction in the 1980:s, the integration of light sources, particularly lasers, onto silicon remains a major challenge. This thesis aims for the de- velopment of a process to heterogeneously integrate III-V photonic components, such as Multi-Quantum Well (MQW) lasers and PiN photodiodes, grown on Indium Phosphide (InP) substrates, onto silicon chips using Micro Transfer Printing. The focus has primarily been on the optimization of a process flow to enable transfer and optical/electrical pumping of hybrid InP/Si Photonic Crystal Surface Emitting Lasers (PCSELs). Based on this process, continuous-wave lasing from optically pumped 1.55-μm range PCSELs fabricated on a silicon substrate was demonstrated at room temperature.

Abstract [sv]

Kiselfotonik har potentialen att revolutionera elektronikindustrin genom att integrera fotoniska funktioner med konventionella elektroniska kretsar på ett enda chip. Trots betydande framsteg sedan introduktionen p å 1980 -talet har integrationen av ljuskällor, särskilt lasrar, på kisel förblivit en stor utmaning. Denna avhandling syftar till att utvecklingen av en process för heterogenb integration av III-V-halvledarbaserade fotoniska komponenter, såsom lasrar och fotodioder odlade på indiumfosfidsubstrat, på kiselchips med hjälp av transferprintteknik. Fokus har främst varit optimeringen av ett processflöde för att möjliggöraöverföring och optisk/elektrisk pumpning av ytemitterande fotoniska kristalllasrar (PCSELs) av hybrid-typ. Detta har resulterat i demonstrationen av kontinuerligt optiskt pumpade 1,55-mikrometer PCSELs vid rumstemperatur.

Place, publisher, year, edition, pages
2024. , p. 35
Series
TRITA-EECS-EX ; 2024:985
National Category
Computer and Information Sciences
Identifiers
URN: urn:nbn:se:kth:diva-361411OAI: oai:DiVA.org:kth-361411DiVA, id: diva2:1945499
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Available from: 2025-03-24 Created: 2025-03-18 Last updated: 2025-03-24Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
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