Tailoring optical properties of pulsed laser deposited TiO2 films
2008 (English)In: PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY / [ed] Johansson LSO; Andersen JN; Gothelid M; Helmersson U; Montelius L; Rubel M; Setina J; Wernersson LE, BRISTOL, ENGLAND: IOP PUBLISHING LTD , 2008, no 100, 082035- p.Conference paper (Refereed)
The paper is dedicated to the investigation into optical properties of TiO2 thin films pulsed laser deposited at the temperature as low as 150 degrees C and subjected to the following heat treatment. Properties of obtained nanocrystalline films were compared to polycrystalline TiO2 films grown at elevated temperatures. The highest transmission and the best morphology in polycrystalline films have been obtained at the growth temperature of 300 degrees C. The two methods of post-annealing of amorphous films were employed: annealing at thermodynamically equilibrium conditions and rapid thermal annealing (RTA). RTA at 500 degrees C enables achievement of the best optical performance: smooth surface and high films transparency.
Place, publisher, year, edition, pages
BRISTOL, ENGLAND: IOP PUBLISHING LTD , 2008. no 100, 082035- p.
, Journal of Physics Conference Series, ISSN 1742-6588 ; 100
IdentifiersURN: urn:nbn:se:kth:diva-11133DOI: 10.1088/1742-6596/100/8/082035ISI: 000275655200313OAI: oai:DiVA.org:kth-11133DiVA: diva2:236288
17th International Vacuum Congress/13th International Conference on Surface Science/Internatinal Conference on Nanoscience and Technology
QC 201010082009-09-222009-09-222011-03-04Bibliographically approved