Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows
2006 (English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 15, no 5, 1281-1288 p.Article in journal (Refereed) Published
This paper considers design issues for microvalves for large gas flow control. It introduces out-of-plane knife-gate microvalves as a novel design concept and a proportional microvalve concept for pressure control applications. The design of three different actuator-gate configurations and first prototypes are presented. The first valve prototypes feature thermal silicon-aluminum bimorph actuators and the pressure-flow performance per chip area of the demonstrator valve presented is greatly increased using out-of-plane actuation and an out-of-plane orifice. The characterization of the actuators and of the pressure-flow performance is presented. The prototype valve allows for a flow change of Delta Q = 3.4 standard liters per minute (SLPM) at a pressure change of Delta P = 95 kPa (P-in = 196.3 kPa, P-out = 101.3 kPa) on an active chip area of only 2.3 x 3.7 mm(2).
Place, publisher, year, edition, pages
IEEE Press, 2006. Vol. 15, no 5, 1281-1288 p.
Engineering, Electrical & Electronic; Engineering, Mechanical
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-11827DOI: 10.1109/JMEMS.2006.880279ISI: 000241410600027ScopusID: 2-s2.0-33749984576OAI: oai:DiVA.org:kth-11827DiVA: diva2:284094