On-chip temperature compensation in an integrated slot-waveguide ring resonator refractive index sensor array
2010 (English)In: Optics Express, ISSN 1094-4087, Vol. 18, no 4, 3226-3237 p.Article in journal (Refereed) Published
We present an experimental study of an integrated slot-waveguide refractive index sensor array fabricated in silicon nitride on silica. We study the temperature dependence of the slot-waveguide ring resonator sensors and find that they show a low temperature dependence of -16.6 pm/K, while at the same time a large refractive index sensitivity of 240 nm per refractive index unit. Furthermore, by using on-chip temperature referencing, a differential temperature sensitivity of only 0.3 pm/K is obtained, without individual sensor calibration. This low value indicates good sensor-to-sensor repeatability, thus enabling use in highly parallel chemical assays. We demonstrate refractive index measurements during temperature drift and show a detection limit of 8.8 x 10(-6) refractive index units in a 7 K temperature operating window, without external temperature control. Finally, we suggest the possibility of athermal slot-waveguide sensor design.
Place, publisher, year, edition, pages
2010. Vol. 18, no 4, 3226-3237 p.
SILICON, DENSITY, DEVICES
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-12207DOI: 10.1364/OE.18.003226ISI: 000274795700002ScopusID: 2-s2.0-77149146784OAI: oai:DiVA.org:kth-12207DiVA: diva2:305945
QC 201007152010-03-252010-03-252011-09-02Bibliographically approved